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2022

Categories:History of development
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Time of issue:2022-09-26
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(Summary description)Ø 2 inch mass production, Ø 4 inch low volume supply, Ø 7 inch prototype development.
Dislocation density: 10³cm-² at R&D level, 10⁵cm-² at volume production level.

2022

(Summary description)Ø 2 inch mass production, Ø 4 inch low volume supply, Ø 7 inch prototype development.
Dislocation density: 10³cm-² at R&D level, 10⁵cm-² at volume production level.

Categories:History of development
Author:
Origin:
Time of issue:2022-09-26
Views:0

Information

Supported by the National Key Research Program "Substrate Preparation and Homogeneous Epitaxy for Third Generation Semiconductors" as a project leader

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