2022
- Categories:History of development
- Author:
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- Time of issue:2022-09-26
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(Summary description)Ø 2 inch mass production, Ø 4 inch low volume supply, Ø 7 inch prototype development.
Dislocation density: 10³cm-² at R&D level, 10⁵cm-² at volume production level.
2022
(Summary description)Ø 2 inch mass production, Ø 4 inch low volume supply, Ø 7 inch prototype development.
Dislocation density: 10³cm-² at R&D level, 10⁵cm-² at volume production level.
- Categories:History of development
- Author:
- Origin:
- Time of issue:2022-09-26
- Views:0
Supported by the National Key Research Program "Substrate Preparation and Homogeneous Epitaxy for Third Generation Semiconductors" as a project leader
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